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闸机的正常动作流程包括: (1)初始化寻找零位:闸机处于自由状态->打开电源->闸机往关门方向动作->碰触限位开关->记住当前位置->停止运动->继续运动->碰触限位开关->停止运动->记住当前位置->运动到关门位置; (2)开门动作:接收到开门指令->判断当前状态->开门->开门动作执行完毕; (异常):接收到开门指令->判断当前状态->开门->卡住(过载报警)->停留N秒->开门(慢速)->停留M秒->开门->开门动作执行完毕(如果连续3次不能将闸机打开,则闸机释放,报警)。 (3)关门动作:接收到关门指令->判断当前状态->关门->关门动作执行完毕; (异常):接收到关门指令->判断当前状态->关门->卡住(过载报警)->停留N秒->关门 (慢速)->停留M秒->关门->关门动作执行完毕(如果连续3次不能将闸机关闭,则闸机释放,报警)。 2、闸机矩形门异常状态的处理方法 当闸机处于开/关门的过程中异常状态的处理方法: (1)开关门异常处理,上文已经提到过了; (2)初始化找零位过程中异常状态处理,异常状态包括:找不到开关或在运动过程中由于有东西卡住闸机从而驱动器报警,此时放弃初始化,检查闸机机械状态后再进行初始化; (3)门开着的时候异常状况的处理:闸机先释放,然后再运行到关门位置; (4)门开着的时候异常情况的处理:闸机先释放,然后再运行到开门位置。
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FANUC R-J3C COMPACT, INNOVATIVE WAFER TRANSFER ROBOT
BROOKS AUTOMATION 001-6605-01 CONTROLLER
AE,ADVANCED ENERGY PE-5000 PLASMA POWER RF GENERATOR
VARIAN MATCHING NETWORK CONTROLLER 04-7051186-05,705734
KOKUSAI ULTRASONIC GENERATOR 1.2K,1Mhz,UO1200MCA IMTEC
RFPP RF30S,30S 3KW PLASMA RF POWER GENERATOR
TOSHIBA YAG LASER UYD-A8300,LAY-203FA-6AG,HVD DRIVER
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POSITRON ORISIS 800309/2 800365/2 800520/2 800331
OLYMPUS MICROSCOPE OBJECTIVE LM PLAN LENS 2.5X~50X
YASKAWA LINEAR SERVO MOTOR SGLFM,XU-ACT97L,HEIDENHAIN
APPLIED MATERIAL SENSOR CONTROL INTERFACE SCI-Plus
EQUIPE PRI AUTOMATION ROBOT CONTROLLER ESC-212B
ASYST WAFER TRASNFER ROBOT UTX-F5500,CS-7100,SB-700
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HORIBA CHEMICAL SOLUTION CONCENTRATION MONITOR CS-100
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YASKAWA WAFER TRANSFER ROBOT XU-RCM6501
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YASKAWA WAFER TRANSFER ROBOT XU-RCM6501
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BROOKS AUTOMATION WAFER TRANSFER ROBOT 1-0125
EBARA ET300 VACUUME TURBO MOLECULAR PUMP
RODENSTOCK F=254mm, F-THETA-RONAR LASER MARKING LENS
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NSK MEGATORQUE DIRECT DRIVE DD SERVO DRIVE,MOTOR,ESA
PHENIX 1200,KAIJO ULTRASONIC GENERATOR TYPE 7339 AC200V
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KOGANEI ALPHA ACTUATOR ABBLSHK1050,SRCH 15, ABTPB PEN.
POWER TEN DC POWER SUPPLHY 0-5V,0-365AMP,P62B-5325D
SMC THERMO-CON HEC200-2-X5 WATER COOLED CHILLER
YOKOGAWA DD SERVO ACTUATOR SD1050A02 DM1050A00 CNC
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SMC THERMO-CON HEC205W-2A WATER COOLDED CHILLER
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YASKAWA SIGMA-II 1.5KW SERVO PACK,MOTOR CNC
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NSK MegaTORQUE DRIVER NIB M-ESB-YSB5120ABC1
MOTOROLA MVME,VME 162-522A W/ TWO ETHERNET,LAN MODULE
OREGON MICRO SYSTEMS MAXP-8000 8 AXIS MOTION CONTIOLLER
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AERA MFC FC-PA780C MASS FLOW CONTROLLER FUJIKIN TESCOM
FAST CORPORATION FV-2300 DOS IMAGING SYSTEM
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Ushio SP-ⅤUV Lamp SP5-250UC, FIBRE OPTIC, ILLUMINATOR
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YASKAWA PLC INPUT MOD. DI-01 EXIOIF MACHINE CONTROLLER FREE SHIPPING AND HANDLING FEE POWER ON TESTED
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TOKYO ELECTRON LIMITED TEL GAS BOX TERMINATOR 3M81-0198
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PROFORT 820 TEACH PENDANT PF820-DSETM3 NEW IN BOX
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HUGLE ELECTRONICS,IONIZER STATIC MEASURER,METER 750
PROFACE AGP3800-T1-AF GP3000 SERIES TOUCH SCREEN
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IAI X-SEL CONTROLLER XSEL-4-100A-100AB-3-DA-3-DA-N1-EEE
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SA SVME /AT-486P AT-BCN/P SVA007-3-S SVA-604,SVA-007
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